Fluorescence of sputtered metal atoms and filling gas atoms in argon and neon rf sputtering glow discharges

Fluorescence of sputtered metal atoms and filling gas atoms in argon and neon rf sputtering glow discharges

datePublished

• 1975

description

• kuvitettu

identifier

• propertyID: FI-FENNI value: 217776
• propertyID: FI-MELINDA value: 000695244

isbn

• 9516660576

isPartOf

• Acta polytech. Scand., Ma, Math., comput. manag. eng. ser
• Fennica

name

• Fluorescence of sputtered metal atoms and filling gas atoms in argon and neon rf sputtering glow discharges

numberOfPages

• 37 s.

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Helsinki organizer: Suomen teknillisten tieteiden akatemia Teknillisten tieteiden akatemia

publisher

• Suomen teknillisten tieteiden akatemia
• Teknillisten tieteiden akatemia