Breakdown phenomena in rf sputtering discharges

Breakdown phenomena in rf sputtering discharges

datePublished

• 1975

description

• kuvitettu

identifier

• propertyID: FI-FENNI value: 217774
• propertyID: FI-MELINDA value: 000695242

isbn

• 9516660533

isPartOf

• Acta polytechnica Scandinavica, Mathematics and computer science series
• Fennica

name

• Breakdown phenomena in rf sputtering discharges

numberOfPages

• 27 s.

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Helsinki organizer: Suomen teknillisten tieteiden akatemia Teknillisten tieteiden akatemia

publisher

• Suomen teknillisten tieteiden akatemia
• Teknillisten tieteiden akatemia