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Franssila, Sami
URI:
http://urn.fi/URN:NBN:fi:au:pn:000042436
name
Franssila, Sami
Authored works
Introduction to microfabrication
Plasma etching in microdevice fabrication : thin film and process integration aspects
Works contributed to
Kytky : vihjekirja vaeltajajohtajille
Microelectronics programme 1987-1991
Proceedings of 15th Nordic Semiconductor Meeting
Works about Franssila, Sami
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