@prefix rdf: <http://www.w3.org/1999/02/22-rdf-syntax-ns#> .
@prefix rdfs: <http://www.w3.org/2000/01/rdf-schema#> .
@prefix schema: <http://schema.org/> .
@prefix skos: <http://www.w3.org/2004/02/skos/core#> .
@prefix xml: <http://www.w3.org/XML/1998/namespace> .
@prefix xsd: <http://www.w3.org/2001/XMLSchema#> .

<http://urn.fi/URN:NBN:fi:bib:me:W00007469700> schema:contributor <http://urn.fi/URN:NBN:fi:au:pn:000042436> ;
    schema:name "Proceedings of 15th Nordic Semiconductor Meeting" .

<http://urn.fi/URN:NBN:fi:bib:me:W00065401400> schema:contributor <http://urn.fi/URN:NBN:fi:au:pn:000042436> ;
    schema:name "Kytky : vihjekirja vaeltajajohtajille" .

<http://urn.fi/URN:NBN:fi:bib:me:W00080532700> schema:author <http://urn.fi/URN:NBN:fi:au:pn:000042436> ;
    schema:name "Plasma etching in microdevice fabrication : thin film and process integration aspects" .

<http://urn.fi/URN:NBN:fi:bib:me:W00464094600> schema:contributor <http://urn.fi/URN:NBN:fi:au:pn:000042436> ;
    schema:name "Microelectronics programme 1987-1991" .

<http://urn.fi/URN:NBN:fi:bib:me:W00484594900> schema:author <http://urn.fi/URN:NBN:fi:au:pn:000042436> ;
    schema:name "Introduction to microfabrication" .

<http://urn.fi/URN:NBN:fi:au:pn:000042436> a schema:Person ;
    schema:name "Franssila, Sami" .