KOH anisotropic silicon etching for MEMS accelerometer fabrication

URI: http://urn.fi/URN:NBN:fi:bib:me:W00677872400
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  • KOH anisotropic silicon etching for MEMS accelerometer fabrication
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KOH anisotropic silicon etching for MEMS accelerometer fabrication

URI: http://urn.fi/URN:NBN:fi:bib:me:I00677872402
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  • 9789526056807
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  • KOH anisotropic silicon etching for MEMS accelerometer fabrication

KOH anisotropic silicon etching for MEMS accelerometer fabrication

URI: http://urn.fi/URN:NBN:fi:bib:me:I00677872401
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  • KOH anisotropic silicon etching for MEMS accelerometer fabrication

KOH anisotropic silicon etching for MEMS accelerometer fabrication

URI: http://urn.fi/URN:NBN:fi:bib:me:I00677872403
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  • KOH anisotropic silicon etching for MEMS accelerometer fabrication
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KOH anisotropic silicon etching for MEMS accelerometer fabrication

URI: http://urn.fi/URN:NBN:fi:bib:me:I00677872400
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  • 2014
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  • kuvitettu
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  • propertyID: FI-MELINDA value: 006778724
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  • 9789526056791
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  • KOH anisotropic silicon etching for MEMS accelerometer fabrication
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  • 157 s.
P60048
P60050
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  • location: Espoo organizer: Aalto University, School of Chemical Technology, Department of Materials Science and Engineering
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  • Aalto University, School of Chemical Technology, Department of Materials Science and Engineering

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