In situ characterization of ALD processes and study of reaction mechanisms for high-k metal oxide formation

URI: http://urn.fi/URN:NBN:fi:bib:me:W00672976800
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  • In situ characterization of ALD processes and study of reaction mechanisms for high-k metal oxide formation
P60049

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In situ characterization of ALD processes and study of reaction mechanisms for high-k metal oxide formation

URI: http://urn.fi/URN:NBN:fi:bib:me:I00672976801
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  • Yhteenveto-osa julkaistu myös verkkoaineistona
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  • In situ characterization of ALD processes and study of reaction mechanisms for high-k metal oxide formation

In situ characterization of ALD processes and study of reaction mechanisms for high-k metal oxide formation

URI: http://urn.fi/URN:NBN:fi:bib:me:I00672976802
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  • 9789521099267
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  • In situ characterization of ALD processes and study of reaction mechanisms for high-k metal oxide formation

In situ characterization of ALD processes and study of reaction mechanisms for high-k metal oxide formation

URI: http://urn.fi/URN:NBN:fi:bib:me:I00672976803
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  • In situ characterization of ALD processes and study of reaction mechanisms for high-k metal oxide formation
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In situ characterization of ALD processes and study of reaction mechanisms for high-k metal oxide formation

URI: http://urn.fi/URN:NBN:fi:bib:me:I00672976800
datePublished
  • 2014
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  • Artikkeliväitöskirjan yhteenveto-osa ja 6 eripainosta.
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  • propertyID: FI-MELINDA value: 006729768
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  • 9789521099250
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  • In situ characterization of ALD processes and study of reaction mechanisms for high-k metal oxide formation
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  • 52, [67] sivu
P60048
P60050
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  • location: Helsinki organizer: Helsingin yliopisto
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