Atomic layer deposition of groups 4 and 5 transition metal oxide thin films : focus on heteroleptic precursors

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  • Atomic layer deposition of groups 4 and 5 transition metal oxide thin films : focus on heteroleptic precursors
P60049

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Atomic layer deposition of groups 4 and 5 transition metal oxide thin films : focus on heteroleptic precursors

description
  • Julkaistu myös painettuna ISBN 978-952-10-8806-3 (nid.)
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  • Atomic layer deposition of groups 4 and 5 transition metal oxide thin films : focus on heteroleptic precursors

Atomic layer deposition of groups 4 and 5 transition metal oxide thin films : focus on heteroleptic precursors

description
  • Yhteenveto-osa julkaistu myös verkkoaineistona ISBN 978-952-10-8807-0 (PDF)
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  • Atomic layer deposition of groups 4 and 5 transition metal oxide thin films : focus on heteroleptic precursors

Atomic layer deposition of groups 4 and 5 transition metal oxide thin films : focus on heteroleptic precursors

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isPartOf
name
  • Atomic layer deposition of groups 4 and 5 transition metal oxide thin films : focus on heteroleptic precursors
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Atomic layer deposition of groups 4 and 5 transition metal oxide thin films : focus on heteroleptic precursors

datePublished
  • 2013
description
  • Artikkeliväitöskirjan yhteenveto-osa ja 6 eripainosta.
  • kuvitettu
  • Nimiösivulla myös: Laboratory of Inorganic Chemistry, Department of Chemistry, Faculty of Science, University of Helsinki, Finland.
  • Tiivistelmä ja 6 erip.
identifier
  • propertyID: FI-FENNI value: 1024993
  • propertyID: FI-MELINDA value: 006210528
  • propertyID: skl value: fx1024993
isbn
  • 9789521088063
isPartOf
name
  • Atomic layer deposition of groups 4 and 5 transition metal oxide thin films : focus on heteroleptic precursors
numberOfPages
  • 68, [55] sivu
P60048
P60050
publication
  • location: Helsinki organizer: Helsingin yliopisto
publisher

Atomic layer deposition of groups 4 and 5 transition metal oxide thin films : focus on heteroleptic precursors

bookFormat
datePublished
  • 2013
description
  • Artikkeliväitöskirjan yhteenveto-osa.
  • Nimeke PDF-nimiönäytöstä.
  • Nimiösivulla myös: Laboratory of Inorganic Chemistry, Department of Chemistry, Faculty of Science, University of Helsinki, Finland.
identifier
  • propertyID: FI-FENNI value: 1024994
  • propertyID: FI-MELINDA value: 006210529
  • propertyID: skl value: fx1024994
isbn
  • 9789521088070
isPartOf
name
  • Atomic layer deposition of groups 4 and 5 transition metal oxide thin films : focus on heteroleptic precursors
numberOfPages
  • 1 PDF-tiedosto (68 s.)
P60048
P60050
publication
  • location: Helsinki organizer: Helsingin yliopisto
publisher
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