Atomic layer deposition of high permittivity oxides : film growth and in situ studies

URI: http://urn.fi/URN:NBN:fi:bib:me:W00531124400
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  • Atomic layer deposition of high permittivity oxides : film growth and in situ studies
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Atomic layer deposition of high permittivity oxides : film growth and in situ studies

URI: http://urn.fi/URN:NBN:fi:bib:me:I00531124401
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  • Julkaistu myös verkkoaineistona
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  • Atomic layer deposition of high permittivity oxides : film growth and in situ studies

Atomic layer deposition of high permittivity oxides : film growth and in situ studies

URI: http://urn.fi/URN:NBN:fi:bib:me:I00657085801
description
  • Myös painettuna (ISBN 952-91-4999-9)
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  • Atomic layer deposition of high permittivity oxides : film growth and in situ studies
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Atomic layer deposition of high permittivity oxides : film growth and in situ studies

URI: http://urn.fi/URN:NBN:fi:bib:me:I00531124400
datePublished
  • 2002
description
  • kuvitettu
  • Tiivistelmä ja 10 erip. - Nimiösivulla myös: Laboratory of Inorganic Chemistry, Department of Chemistry, Faculty of Science, University of Helsinki
identifier
  • propertyID: FI-FENNI value: 715732
  • propertyID: FI-MELINDA value: 005311244
  • propertyID: skl value: fx715732
isbn
  • 9521006463
  • 9529149999
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  • Atomic layer deposition of high permittivity oxides : film growth and in situ studies
numberOfPages
  • 69, [67] sivu
P60048
P60050
publication
  • location: Helsinki organizer: A. Rahtu
publisher
  • A. Rahtu
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Atomic layer deposition of high permittivity oxides : film growth and in situ studies

URI: http://urn.fi/URN:NBN:fi:bib:me:I00657085800
bookFormat
datePublished
  • 2002
description
  • Kuvailun perusta: Nimeke nimiönäytöstä.
  • Tekstiä
  • Tiivistelmäosa. - Nimiönäytöllä myös: Laboratory of Inorganic Chemistry, Department of Chemistry, Faculty of Science, University of Helsinki
identifier
  • propertyID: FI-FENNI value: 711878
  • propertyID: FI-MELINDA value: 006570858
  • propertyID: skl value: fx711878
isbn
  • 9521006463
isPartOf
name
  • Atomic layer deposition of high permittivity oxides : film growth and in situ studies
P60048
P60050
publication
  • location: Helsinki organizer: Helsingin yliopisto
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