Ion-implanted capacitively coupled silicon strip detectors with integrated polysilicon bias resistors processed on a 100 mm wafer

URI: http://urn.fi/URN:NBN:fi:bib:me:W00529181900
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  • en
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  • Ion-implanted capacitively coupled silicon strip detectors with integrated polysilicon bias resistors processed on a 100 mm wafer
P60049

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Ion-implanted capacitively coupled silicon strip detectors with integrated polysilicon bias resistors processed on a 100 mm wafer

URI: http://urn.fi/URN:NBN:fi:bib:me:I00529181900
datePublished
  • 1991
description
  • kuvitettu
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  • propertyID: FI-FENNI value: 253935
  • propertyID: FI-MELINDA value: 005291819
  • propertyID: skl value: f920608
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  • Ion-implanted capacitively coupled silicon strip detectors with integrated polysilicon bias resistors processed on a 100 mm wafer
numberOfPages
  • 5, [13] s.
P60048
P60050
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  • location: Helsinki organizer: Helsingin yliopisto
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