Radical enhanced atomic layer deposition of metals and oxides

URI: http://urn.fi/URN:NBN:fi:bib:me:W00301613800
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  • Radical enhanced atomic layer deposition of metals and oxides
P60049

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Radical enhanced atomic layer deposition of metals and oxides

URI: http://urn.fi/URN:NBN:fi:bib:me:I00642566401
description
  • Myös painettuna (ISBN 952-92-0982-7)
isPartOf
name
  • Radical enhanced atomic layer deposition of metals and oxides

Radical enhanced atomic layer deposition of metals and oxides

URI: http://urn.fi/URN:NBN:fi:bib:me:I00301613801
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  • Julkaistu myös verkkoaineistona
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  • Radical enhanced atomic layer deposition of metals and oxides
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Radical enhanced atomic layer deposition of metals and oxides

URI: http://urn.fi/URN:NBN:fi:bib:me:I00301613800
datePublished
  • 2006
description
  • kuvitettu
  • Tiivistelmä ja 5 erip.
identifier
  • propertyID: FI-FENNI value: 852566
  • propertyID: FI-MELINDA value: 003016138
  • propertyID: skl value: fx852566
isbn
  • 9521033959
  • 9529209827
isPartOf
name
  • Radical enhanced atomic layer deposition of metals and oxides
numberOfPages
  • 77, [50] sivu
P60048
P60050
publication
  • location: Helsinki organizer: Antti Niskanen
publisher
  • Antti Niskanen
View this in Finna

Radical enhanced atomic layer deposition of metals and oxides

URI: http://urn.fi/URN:NBN:fi:bib:me:I00642566400
bookFormat
datePublished
  • 2006
description
  • Kuvailun perusta: Nimeke nimiönäytöstä.
  • Tekstiä
  • Tiivistelmäosa. - University of Helsinki, Faculty of Science, Department of Chemistry
identifier
  • propertyID: FI-FENNI value: 839613
  • propertyID: FI-MELINDA value: 006425664
  • propertyID: skl value: fx839613
isbn
  • 9521033959
isPartOf
name
  • Radical enhanced atomic layer deposition of metals and oxides
P60048
P60050
publication
  • location: Helsinki organizer: Helsingin yliopisto
publisher
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