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Tekstiä
Tiivistelmäosa. - Laboratory of Inorganic Chemistry, Department of Chemistry, Faculty of Science, University of Helsinki

identifier

propertyID: FI-FENNI value: 792050
propertyID: FI-MELINDA value: 006571391
propertyID: skl value: fx792050

isbn

9521023902

isPartOf

Fennica

name

Atomic layer deposition of noble metal thin films

P60048

<http://rdaregistry.info/termList/RDACarrierType/1018>

P60050

<http://rdaregistry.info/termList/RDAMediaType/1003>

publication

location: Helsinki organizer: Helsingin yliopisto

publisher

Helsingin yliopisto

url

<http://ethesis.helsinki.fi/julkaisut/mat/kemia/vk/aaltonen/>

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Atomic layer deposition of noble metal thin films

URI: http://urn.fi/URN:NBN:fi:bib:me:I00096376300

datePublished

2005

description

kuvitettu
Tiivistelmä ja 8 erip.
Tiivistelmä ja 8 erip. - Laboratory of Inorganic Chemistry, Department of Chemistry, Faculty of Science, University of Helsinki

identifier

propertyID: FI-FENNI value: 813273
propertyID: FI-MELINDA value: 000963763
propertyID: skl value: fx813273

isbn

9529184603

isPartOf

Fennica

name

Atomic layer deposition of noble metal thin films

numberOfPages

71, [49] sivu

P60048

<http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

<http://rdaregistry.info/termList/RDAMediaType/1007>

publication

location: Helsinki organizer: Titta Aaltonen

publisher

Titta Aaltonen

Atomic layer deposition of noble metal thin films

Instances

Atomic layer deposition of noble metal thin films

Atomic layer deposition of noble metal thin films

Atomic layer deposition of noble metal thin films

Atomic layer deposition of noble metal thin films