Emissions from incineration of semiconductor manufacturing gases : preliminary thermodynamic equilibrium analysis

Emissions from incineration of semiconductor manufacturing gases : preliminary thermodynamic equilibrium analysis

datePublished

• 1995

description

• kuvitettu

identifier

• propertyID: FI-FENNI value: 431757
• propertyID: FI-MELINDA value: 000803582

isbn

• 9516504949

isPartOf

• Fennica
• Report / Åbo Akademi, Process Chemistry Group

name

• Emissions from incineration of semiconductor manufacturing gases : preliminary thermodynamic equilibrium analysis

numberOfPages

• 27, [3] s.

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Åbo organizer: Åbo Akademi

publisher

• Åbo Akademi