Characterization of surface species generated in atomic layer epitaxy on silica

Characterization of surface species generated in atomic layer epitaxy on silica

datePublished

• 1993

description

• kuvitettu
• Tiivistelmä ja 8 erip. - Nimiösivulla myös: University of Helsinki, Department of Chemistry, Analytical Chemistry Division

identifier

• propertyID: FI-FENNI value: 340191
• propertyID: FI-MELINDA value: 000752574

isbn

• 9529051786

isPartOf

• Fennica

name

• Characterization of surface species generated in atomic layer epitaxy on silica

numberOfPages

• iii, 46, [106] s.

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Helsinki organizer: S. Haukka

publisher

• S. Haukka