Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching

URI: http://urn.fi/URN:NBN:fi:bib:me:W00022307900
author
inLanguage
  • en
isPartOf
name
  • Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching
P60049

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Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching

URI: http://urn.fi/URN:NBN:fi:bib:me:I00022307900
datePublished
  • 2000
description
  • kuvitettu
identifier
  • propertyID: FI-FENNI value: 660877
  • propertyID: FI-MELINDA value: 000223079
  • propertyID: skl value: fx660877
isbn
  • 9513907708
isPartOf
name
  • Nanofabrication by atomic force microscopy, electron beam lithography and reactive ion etching
numberOfPages
  • 98, [1] s.
P60048
P60050
publication
  • location: Jyväskylä organizer: Jyväskylän kasvatusopillinen korkeakoulu Jyväskylän yliopisto
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