Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

datePublished

• 1999

description

• kuvitettu

identifier

• propertyID: FI-FENNI value: 640024
• propertyID: FI-MELINDA value: 000202940
• propertyID: skl value: fx640024

isbn

• 9512245396

isPartOf

• Fennica
• Teknillinen korkeakoulu talonrakennusteknikan laboratorion julkaisuja = Helsinki University of Technology Laboratory of Structural Engineering and Building Physics publications

name

• Multilevel structures in sol-gel thin films with a single UV-exposure using a gray-scale mask

numberOfPages

• 12 s.

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Espoo organizer: Teknillinen korkeakoulu

publisher

• Teknillinen korkeakoulu