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Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:W00922883300
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atomikerroskasvatus
mikrorakenteet
nanorakenteet
ohutkalvot
optiikka
valmistustekniikka
author
Häyrinen, Markus
inLanguage
en
isPartOf
Fennica
name
Benefits of atomic layer deposition in nanophotonic device fabrication
P60049
<http://rdaregistry.info/termList/RDAContentType/1020>
Instances
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-
-
-
-, e-book
2015 : Itä-Suomen yliopisto
2015 : Itä-Suomen yliopisto, e-book
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883402
isbn
9789526119908
isPartOf
Fennica
Publications of the University of Eastern Finland : Dissertations in Social Sciences and Business Studies
name
Benefits of atomic layer deposition in nanophotonic device fabrication
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883301
description
Yhteenveto-osa julkaistu myös verkkoaineistona
isPartOf
Fennica
Publications of the University of Eastern Finland : Dissertations in Social Sciences and Business Studies
name
Benefits of atomic layer deposition in nanophotonic device fabrication
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883401
description
Julkaistu myös painettuna
isPartOf
Fennica
Publications of the University of Eastern Finland : Dissertations in Social Sciences and Business Studies
name
Benefits of atomic layer deposition in nanophotonic device fabrication
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883302
isbn
9789526119915
isPartOf
Fennica
Publications of the University of Eastern Finland : Dissertations in Social Sciences and Business Studies
name
Benefits of atomic layer deposition in nanophotonic device fabrication
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883303
bookFormat
<http://schema.org/EBook>
isPartOf
Fennica
Publications of the University of Eastern Finland : Dissertations in Social Sciences and Business Studies
name
Benefits of atomic layer deposition in nanophotonic device fabrication
url
<http://urn.fi/URN:ISBN:978-952-61-1991-5>
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883300
datePublished
2015
description
Artikkeliväitöskirjan yhteenveto-osa ja 5 eripainosta.
kuvitettu
Nimiösivulla myös: Department of Physics and Mathematics.
identifier
propertyID:
FI-MELINDA
value:
009228833
isbn
9789526119908
isPartOf
Fennica
Publications of the University of Eastern Finland : Dissertations in Social Sciences and Business Studies
name
Benefits of atomic layer deposition in nanophotonic device fabrication
numberOfPages
66, [48] sivu
P60048
<http://rdaregistry.info/termList/RDACarrierType/1048>
<http://rdaregistry.info/termList/RDACarrierType/1049>
P60050
<http://rdaregistry.info/termList/RDAMediaType/1007>
publication
location:
Joensuu
organizer:
Itä-Suomen yliopisto
publisher
Itä-Suomen yliopisto
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883400
bookFormat
<http://schema.org/EBook>
datePublished
2015
description
Artikkeliväitöskirjan yhteenveto-osa.
Nimeke nimiösivulta.
Nimiösivulla myös: Department of Physics and Mathematics.
identifier
propertyID:
FI-MELINDA
value:
009228834
isbn
9789526119915
isPartOf
Fennica
Publications of the University of Eastern Finland : Dissertations in Social Sciences and Business Studies
name
Benefits of atomic layer deposition in nanophotonic device fabrication
numberOfPages
1 verkkoaineisto (79 s.)
P60048
<http://rdaregistry.info/termList/RDACarrierType/1018>
P60050
<http://rdaregistry.info/termList/RDAMediaType/1003>
publication
location:
Joensuu
organizer:
Itä-Suomen yliopisto
publisher
Itä-Suomen yliopisto
url
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