Diffractive optics and electron beam lithography

Diffractive optics and electron beam lithography

datePublished

• 1998

description

• kuvitettu
• Tiivistelmä ja 6 erip.

identifier

• propertyID: FI-FENNI value: 615699
• propertyID: FI-MELINDA value: 003284114
• propertyID: skl value: fx615699

isbn

• 9517087276
• 9617087276

isPartOf

• Dissertations / Joensuun yliopisto, Department of Physics
• Fennica

name

• Diffractive optics and electron beam lithography

numberOfPages

• viii, 54, [60] s.

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Joensuu organizer: Joensuun yliopisto

publisher

• Joensuun yliopisto