Application of optical spectroscopy to the analysis of the luminescence from rf-sputtering glow discharge and sputtered films

Application of optical spectroscopy to the analysis of the luminescence from rf-sputtering glow discharge and sputtered films

datePublished

• 1975

description

• Väitösk. lisäksi 1 irtol.

identifier

• propertyID: FI-FENNI value: 292106
• propertyID: FI-MELINDA value: 003132039
• propertyID: skl value: fx292106

isbn

• 9514202619

isPartOf

• Acta universitatis Ouluensis. Series E, Scientiae rerum socilium
• Fennica

name

• Application of optical spectroscopy to the analysis of the luminescence from rf-sputtering glow discharge and sputtered films

numberOfPages

• 16, [1] s

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Oulu organizer: Oulun yliopisto

publisher

• Oulun yliopisto