Rf sputtering investigations using an apparatus equipped with an optical spectrometer

Rf sputtering investigations using an apparatus equipped with an optical spectrometer

datePublished

• 1974

description

• kuvitettu

identifier

• propertyID: FI-FENNI value: 217772
• propertyID: FI-MELINDA value: 000695240

isbn

• 9516660479

isPartOf

• Acta polytechnica Scandinavica. Ma, Mathematics and computing in engineering series
• Fennica

name

• Rf sputtering investigations using an apparatus equipped with an optical spectrometer

numberOfPages

• 37 s.

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Helsinki organizer: Suomen teknillisten tieteiden akatemia Teknillisten tieteiden akatemia

publisher

• Suomen teknillisten tieteiden akatemia
• Teknillisten tieteiden akatemia