On thermal oxidation of silicon in steam

On thermal oxidation of silicon in steam

datePublished

• 1970

description

• kuvitettu

identifier

• propertyID: FI-FENNI value: 164797
• propertyID: FI-MELINDA value: 000673069
• propertyID: skl value: fx164797

isPartOf

• Fennica
• Tiedotus / Valtion teknillinen tutkimuslaitos. Sarja 2, Metalli

name

• On thermal oxidation of silicon in steam

numberOfPages

• 12 s.

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>