Lithography in experimental environment

Lithography in experimental environment

datePublished

• 2000

description

• kuvitettu

identifier

• propertyID: FI-FENNI value: 665078
• propertyID: FI-MELINDA value: 000222207
• propertyID: skl value: fx665078

isbn

• 9512248875

isPartOf

• Fennica
• Report / Helsinki University of Technology, Radio Laboratory, S

name

• Lithography in experimental environment

numberOfPages

• 17, [3] s.

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Espoo organizer: Teknillinen korkeakoulu

publisher

• Teknillinen korkeakoulu