The homoepitaxial growth of silicon by adapting the UHV/CVD-method

The homoepitaxial growth of silicon by adapting the UHV/CVD-method

datePublished

• 1994

description

• kuvitettu

identifier

• propertyID: FI-FENNI value: 375822
• propertyID: FI-MELINDA value: 000184639
• propertyID: skl value: fx375822

isbn

• 9512903075

isPartOf

• Fennica
• Report series / University of Turku, Department of Applied Physics. R

name

• The homoepitaxial growth of silicon by adapting the UHV/CVD-method

numberOfPages

• 15, [1] lehteä

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Turku organizer: Turun yliopisto

publisher

• Turun yliopisto