Micromechanical characterization of ALD thin films

URI: http://urn.fi/URN:NBN:fi:bib:me:W00866183600
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  • Micromechanical characterization of ALD thin films
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Micromechanical characterization of ALD thin films

URI: http://urn.fi/URN:NBN:fi:bib:me:I00898022302
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  • 9789526063447
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  • Micromechanical characterization of ALD thin films

Micromechanical characterization of ALD thin films

URI: http://urn.fi/URN:NBN:fi:bib:me:I00866183602
isbn
  • 9789526063454
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name
  • Micromechanical characterization of ALD thin films

Micromechanical characterization of ALD thin films

URI: http://urn.fi/URN:NBN:fi:bib:me:I00866183601
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  • Micromechanical characterization of ALD thin films

Micromechanical characterization of ALD thin films

URI: http://urn.fi/URN:NBN:fi:bib:me:I00898022301
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  • Micromechanical characterization of ALD thin films

Micromechanical characterization of ALD thin films

URI: http://urn.fi/URN:NBN:fi:bib:me:I00866183603
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  • Micromechanical characterization of ALD thin films
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Micromechanical characterization of ALD thin films

URI: http://urn.fi/URN:NBN:fi:bib:me:I00866183600
datePublished
  • 2015
description
  • Artikkeliväitöskirjan yhteenveto-osa ja 5 eripainosta.
  • kuvitettu
  • Nimiösivulla myös: Aalto University School of Chemical Technology, Department of Materials Science and Engineering, Microfabrication Group.
identifier
  • propertyID: FI-MELINDA value: 008661836
isbn
  • 9789526063447
isPartOf
name
  • Micromechanical characterization of ALD thin films
numberOfPages
  • 80, [39] sivu
P60048
P60050
publication
  • location: Helsinki organizer: Aalto-yliopisto
publisher

Micromechanical characterization of ALD thin films

URI: http://urn.fi/URN:NBN:fi:bib:me:I00898022300
bookFormat
datePublished
  • 2015
description
  • Artikkeliväitöskirjan yhteenveto-osa.
  • Nimeke nimiösivulta.
  • Nimiösivulla myös: Aalto University School of Chemical Technology, Department of Materials Science and Engineering, Microfabrication Group.
identifier
  • propertyID: FI-MELINDA value: 008980223
isbn
  • 9789526063454
isPartOf
name
  • Micromechanical characterization of ALD thin films
numberOfPages
  • 1 verkkoaineisto (86 s.)
P60048
P60050
publication
  • location: Helsinki organizer: Aalto-yliopisto
publisher
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