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Thermal and plasma-enhanced atomic layer deposition :
URI:
http://urn.fi/URN:NBN:fi:bib:me:W00721279100
about
atomikerroskasvatus
nanotekniikka
ohutkalvot
author
Pyymaki Perros, Alexander Christian
inLanguage
en
isPartOf
Fennica
name
Thermal and plasma-enhanced atomic layer deposition :
Thermal and plasma-enhanced atomic layer deposition : the study of and employment in various nanotechnology applications
P60049
<http://rdaregistry.info/termList/RDAContentType/1020>
Instances
-
-
-, e-book
2015 : Aalto-yliopisto
Thermal and plasma-enhanced atomic layer deposition : the study of and employment in various nanotechnology applications
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00721279101
description
Yhteenveto-osa julkaistu myös verkkoaineistona
isPartOf
Fennica
Report / Helsinki University of Technoloy, Networking Laboratory
name
Thermal and plasma-enhanced atomic layer deposition : the study of and employment in various nanotechnology applications
Thermal and plasma-enhanced atomic layer deposition :
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00721279102
isbn
9789526062372
isPartOf
Fennica
Report / Helsinki University of Technoloy, Networking Laboratory
name
Thermal and plasma-enhanced atomic layer deposition :
Thermal and plasma-enhanced atomic layer deposition : the study of and employment in various nanotechnology applications
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00721279103
bookFormat
<http://schema.org/EBook>
isPartOf
Fennica
Report / Helsinki University of Technoloy, Networking Laboratory
name
Thermal and plasma-enhanced atomic layer deposition : the study of and employment in various nanotechnology applications
url
<http://urn.fi/URN:ISBN:978-952-60-6237-2>
Thermal and plasma-enhanced atomic layer deposition : the study of and employment in various nanotechnology applications
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00721279100
datePublished
2015
description
Artikkeliväitöskirjan yhteenveto-osa ja 7 eripainosta.
kuvitettu
Nimiösivulla myös: Aalto University School of Electrical Engineering, Department of Micro- and Nanosciences, Nanotechnology Group.
identifier
propertyID:
FI-MELINDA
value:
007212791
isbn
9789526062365
isPartOf
Fennica
Report / Helsinki University of Technoloy, Networking Laboratory
name
Thermal and plasma-enhanced atomic layer deposition : the study of and employment in various nanotechnology applications
numberOfPages
xiii, 103, [55] sivu
P60048
<http://rdaregistry.info/termList/RDACarrierType/1049>
P60050
<http://rdaregistry.info/termList/RDAMediaType/1007>
publication
location:
Helsinki
organizer:
Aalto-yliopisto
publisher
Aalto-yliopisto
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