Fabrication process development for silicon micro and nanosystems

URI: http://urn.fi/URN:NBN:fi:bib:me:W00597144500
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  • Fabrication process development for silicon micro and nanosystems
P60049

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Fabrication process development for silicon micro and nanosystems

URI: http://urn.fi/URN:NBN:fi:bib:me:I00597144501
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  • Yhteenveto-osa julkaistu myös verkkoaineistona ISBN 978-952-60-3593-2 (PDF)
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  • Fabrication process development for silicon micro and nanosystems

Fabrication process development for silicon micro and nanosystems

URI: http://urn.fi/URN:NBN:fi:bib:me:I00597144502
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Fabrication process development for silicon micro and nanosystems

URI: http://urn.fi/URN:NBN:fi:bib:me:I00597144500
datePublished
  • 2011
description
  • Artikkeliväitöskirjan yhteenveto-osa ja 7 eripainosta.
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identifier
  • propertyID: FI-FENNI value: 988884
  • propertyID: FI-MELINDA value: 005971445
  • propertyID: skl value: fx988884
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  • 9789526035925
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  • Fabrication process development for silicon micro and nanosystems
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  • 46, [54] sivu
P60048
P60050
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  • location: Espoo organizer: Aalto-yliopisto
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