Fabrication of SOI micromechanical devices

author
contributor
inLanguage
  • en
isPartOf
name
  • Fabrication of SOI micromechanical devices
P60049

Instances

Fabrication of SOI micromechanical devices

description
  • Julkaistu myös verkkoaineistona
isPartOf
name
  • Fabrication of SOI micromechanical devices

Fabrication of SOI micromechanical devices

datePublished
  • 2005
description
  • kuvitettu
identifier
  • propertyID: FI-FENNI value: 799932
  • propertyID: FI-MELINDA value: 003925482
  • propertyID: skl value: fx799932
isbn
  • 9513664359
  • 9513864359
isPartOf
name
  • Fabrication of SOI micromechanical devices
numberOfPages
  • 87, [28] sivu
  • 87, [35] sivu
P60048
P60050
publication
  • location: Espoo organizer: Valtion teknillinen tutkimuskeskus
publisher

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