Mathematical modeling and numerical simulation of Czochralski silicon crystal growth

Mathematical modeling and numerical simulation of Czochralski silicon crystal growth

datePublished

• 1996

description

• kuvitettu

identifier

• propertyID: FI-FENNI value: 496063
• propertyID: FI-MELINDA value: 000836144
• propertyID: skl value: fx496063

isbn

• 9529821271

isPartOf

• CSC Research reports / CSC-Tieteellinen laskenta Oy
• Fennica

name

• Mathematical modeling and numerical simulation of Czochralski silicon crystal growth

numberOfPages

• 134 s.

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Espoo organizer: CSC Tieteellinen laskenta

publisher

• CSC Tieteellinen laskenta