Atomic layer deposition of TaN, NbN, and MoN films for Cu metallizations

URI: http://urn.fi/URN:NBN:fi:bib:me:W00038790200
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  • en
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  • Atomic layer deposition of TaN, NbN, and MoN films for Cu metallizations
P60049

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Atomic layer deposition of TaN, NbN, and MoN films for Cu metallizations

URI: http://urn.fi/URN:NBN:fi:bib:me:I00657145001
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  • Myös painettuna (ISBN 952-91-8796-3)
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  • Atomic layer deposition of TaN, NbN, and MoN films for Cu metallizations

Atomic layer deposition of TaN, NbN, and MoN films for Cu metallizations

URI: http://urn.fi/URN:NBN:fi:bib:me:I00038790201
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  • Julkaistu myös verkkoaineistona
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  • Atomic layer deposition of TaN, NbN, and MoN films for Cu metallizations
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Atomic layer deposition of TaN, NbN, and MoN films for Cu metallizations

URI: http://urn.fi/URN:NBN:fi:bib:me:I00657145000
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datePublished
  • 2005
description
  • Kuvailun perusta: Nimeke nimiönäytöstä.
  • Tekstiä
  • Tiivistelmäosa. - Laboratory of Inorganic Chemistry, Department of Chemistry, University of Helsinki
identifier
  • propertyID: FI-FENNI value: 799666
  • propertyID: FI-MELINDA value: 006571450
  • propertyID: skl value: fx799666
isbn
  • 9521024976
isPartOf
name
  • Atomic layer deposition of TaN, NbN, and MoN films for Cu metallizations
P60048
P60050
publication
  • location: Helsinki organizer: Helsingin yliopisto
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View this in Finna

Atomic layer deposition of TaN, NbN, and MoN films for Cu metallizations

URI: http://urn.fi/URN:NBN:fi:bib:me:I00038790200
datePublished
  • 2005
description
  • kuvitettu
  • Selkänimeke: PhD thesis 2005.
  • Tiivistelmä ja 5 erip. - Nimiösivulla myös: Laboratory of Inorganic Chemistry, Department of Chemistry, University of Helsinki
identifier
  • propertyID: FI-FENNI value: 806692
  • propertyID: FI-MELINDA value: 000387902
  • propertyID: skl value: fx806692
isbn
  • 9521024976
  • 9529187963
isPartOf
name
  • Atomic layer deposition of TaN, NbN, and MoN films for Cu metallizations
numberOfPages
  • 72, [41] sivu
P60048
P60050
publication
  • location: Helsinki organizer: Petra Alén
publisher
  • Petra Alén

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