Atomic layer deposition of metal and transition metal nitride thin films and in situ mass spectrometry studies

URI: http://urn.fi/URN:NBN:fi:bib:me:W00024112800
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  • Atomic layer deposition of metal and transition metal nitride thin films and in situ mass spectrometry studies
P60049

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Atomic layer deposition of metal and transition metal nitride thin films and in situ mass spectrometry studies

URI: http://urn.fi/URN:NBN:fi:bib:me:I00024112801
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  • Julkaistu myös verkkoaineistona
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  • Atomic layer deposition of metal and transition metal nitride thin films and in situ mass spectrometry studies

Atomic layer deposition of metal and transition metal nitride thin films and in situ mass spectrometry studies

URI: http://urn.fi/URN:NBN:fi:bib:me:I00657088201
description
  • Myös painettuna (ISBN 952-91-4291-9)
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  • Atomic layer deposition of metal and transition metal nitride thin films and in situ mass spectrometry studies
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Atomic layer deposition of metal and transition metal nitride thin films and in situ mass spectrometry studies

URI: http://urn.fi/URN:NBN:fi:bib:me:I00657088200
bookFormat
datePublished
  • 2001
description
  • Kuvailun perusta: Nimeke nimiönäytöstä.
  • Tekstiä
  • Tiivistelmäosa. - Nimiönäytöllä myös: University of Helsinki, Faculty of Science, Department of Chemistry, Laboratory of Inorganic Chemistry, Helsinki
identifier
  • propertyID: FI-FENNI value: 713965
  • propertyID: FI-MELINDA value: 006570882
  • propertyID: skl value: fx713965
isbn
  • 9521002212
isPartOf
name
  • Atomic layer deposition of metal and transition metal nitride thin films and in situ mass spectrometry studies
P60048
P60050
publication
  • location: Helsinki organizer: Helsingin yliopisto
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url
View this in Finna

Atomic layer deposition of metal and transition metal nitride thin films and in situ mass spectrometry studies

URI: http://urn.fi/URN:NBN:fi:bib:me:I00024112800
datePublished
  • 2001
description
  • kuvitettu
  • Tiivistelmä ja 8 erip. - Nimiösivulla myös: University of Helsinki, Faculty of Science, Department of Chemistry, Laboratory of Inorganic Chemistry, Helsinki
identifier
  • propertyID: FI-FENNI value: 697750
  • propertyID: FI-MELINDA value: 000241128
  • propertyID: skl value: fx697750
isbn
  • 9521002212
  • 9529141238
  • 9529142919
isPartOf
name
  • Atomic layer deposition of metal and transition metal nitride thin films and in situ mass spectrometry studies
numberOfPages
  • 65, [63] sivu
P60048
P60050
publication
  • location: Espoo Helsinki organizer: M. Juppo
publisher
  • M. Juppo

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