National Library of Finland
Open Data and Linked Data Service
Search works, persons, organizations and subjects:
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:W00922883300
about
atomikerroskasvatus
mikrorakenteet
nanorakenteet
ohutkalvot
optiikka
valmistustekniikka
author
Häyrinen, Markus
inLanguage
en
isPartOf
Fennica
name
Benefits of atomic layer deposition in nanophotonic device fabrication
P60049
<http://rdaregistry.info/termList/RDAContentType/1020>
Instances
-
-
-
-
-, e-book
2015 : Itä-Suomen yliopisto
2015 : Itä-Suomen yliopisto, e-book
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883401
description
Julkaistu myös painettuna
isPartOf
Fennica
Publications of the University of Eastern Finland. Reports and studies in Forestry and Natural Sciences
name
Benefits of atomic layer deposition in nanophotonic device fabrication
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883301
description
Yhteenveto-osa julkaistu myös verkkoaineistona
isPartOf
Fennica
Publications of the University of Eastern Finland. Reports and studies in Forestry and Natural Sciences
name
Benefits of atomic layer deposition in nanophotonic device fabrication
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883402
isbn
9789526119908
isPartOf
Fennica
Publications of the University of Eastern Finland. Reports and studies in Forestry and Natural Sciences
name
Benefits of atomic layer deposition in nanophotonic device fabrication
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883302
isbn
9789526119915
isPartOf
Fennica
Publications of the University of Eastern Finland. Reports and studies in Forestry and Natural Sciences
name
Benefits of atomic layer deposition in nanophotonic device fabrication
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883303
bookFormat
<http://schema.org/EBook>
isPartOf
Fennica
Publications of the University of Eastern Finland. Reports and studies in Forestry and Natural Sciences
name
Benefits of atomic layer deposition in nanophotonic device fabrication
url
<http://urn.fi/URN:ISBN:978-952-61-1991-5>
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883300
datePublished
2015
description
Artikkeliväitöskirjan yhteenveto-osa ja 5 eripainosta.
kuvitettu
Nimiösivulla myös: Department of Physics and Mathematics.
identifier
propertyID:
FI-MELINDA
value:
009228833
isbn
9789526119908
isPartOf
Fennica
Publications of the University of Eastern Finland. Reports and studies in Forestry and Natural Sciences
name
Benefits of atomic layer deposition in nanophotonic device fabrication
numberOfPages
66, [48] sivu
P60048
<http://rdaregistry.info/termList/RDACarrierType/1048>
<http://rdaregistry.info/termList/RDACarrierType/1049>
P60050
<http://rdaregistry.info/termList/RDAMediaType/1007>
publication
location:
Joensuu
organizer:
Itä-Suomen yliopisto
publisher
Itä-Suomen yliopisto
Benefits of atomic layer deposition in nanophotonic device fabrication
URI:
http://urn.fi/URN:NBN:fi:bib:me:I00922883400
bookFormat
<http://schema.org/EBook>
datePublished
2015
description
Artikkeliväitöskirjan yhteenveto-osa.
Nimeke nimiösivulta.
Nimiösivulla myös: Department of Physics and Mathematics.
identifier
propertyID:
FI-MELINDA
value:
009228834
isbn
9789526119915
isPartOf
Fennica
Publications of the University of Eastern Finland. Reports and studies in Forestry and Natural Sciences
name
Benefits of atomic layer deposition in nanophotonic device fabrication
numberOfPages
1 verkkoaineisto (79 s.)
P60048
<http://rdaregistry.info/termList/RDACarrierType/1018>
P60050
<http://rdaregistry.info/termList/RDAMediaType/1003>
publication
location:
Joensuu
organizer:
Itä-Suomen yliopisto
publisher
Itä-Suomen yliopisto
url
Download this resource as RDF:
Turtle
RDF/XML
N-Triples
JSON-LD