Molybdenum nitride thin films on micro- and nanopatterned substrates : atomic layer deposition and applications

URI: http://urn.fi/URN:NBN:fi:bib:me:W00661204700
author
inLanguage
  • en
isPartOf
name
  • Molybdenum nitride thin films on micro- and nanopatterned substrates : atomic layer deposition and applications
P60049

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Molybdenum nitride thin films on micro- and nanopatterned substrates : atomic layer deposition and applications

URI: http://urn.fi/URN:NBN:fi:bib:me:I00661204700
datePublished
  • 2008
description
  • kuvitettu
identifier
  • propertyID: FI-FENNI value: 892644
  • propertyID: FI-MELINDA value: 006612047
  • propertyID: skl value: fx892644
isbn
  • 9789522191243
isPartOf
name
  • Molybdenum nitride thin films on micro- and nanopatterned substrates : atomic layer deposition and applications
numberOfPages
  • 44, [40] s.
P60048
P60050
publication
  • location: Joensuu organizer: Joensuun yliopisto
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