Nanoimprint litography : a next generation patterning method for nanophotonics

URI: http://urn.fi/URN:NBN:fi:bib:me:W00575191400

author

Viheriälä, Jukka

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en

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Fennica

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Nanoimprint litography : a next generation patterning method for nanophotonics

P60049

<http://rdaregistry.info/termList/RDAContentType/1020>

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-, e-book
2010 : Tampereen teknillinen yliopisto. Optoelektroniikan tutkimuskeskus

Nanoimprint litography : a next generation patterning method for nanophotonics

URI: http://urn.fi/URN:NBN:fi:bib:me:I00575191401

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<http://schema.org/EBook>

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Nanoimprint litography : a next generation patterning method for nanophotonics

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<http://URN.fi/URN:NBN:fi:tty-201008191294>

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Nanoimprint litography : a next generation patterning method for nanophotonics

URI: http://urn.fi/URN:NBN:fi:bib:me:I00575191400

datePublished

2010

description

Artikkeliväitöskirjan tiivistelmäosa ja 7 eripainosta.
kuvitettu

identifier

propertyID: FI-FENNI value: 948166
propertyID: FI-MELINDA value: 005751914
propertyID: skl value: fx948166

isbn

9789521523649

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name

Nanoimprint litography : a next generation patterning method for nanophotonics

numberOfPages

XIII, 83, [39] sivu

P60048

<http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

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publication

location: Tampere organizer: Tampereen teknillinen korkeakoulu Tampereen teknillinen yliopisto. Optoelektroniikan tutkimuskeskus

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