The development of laser chemical vapor deposition and focused ion beam methods for prototype integrated circuit modification

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  • en
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name
  • The development of laser chemical vapor deposition and focused ion beam methods for prototype integrated circuit modification
P60049

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The development of laser chemical vapor deposition and focused ion beam methods for prototype integrated circuit modification

description
  • Julkaistu myös verkkoaineistona
isPartOf
name
  • The development of laser chemical vapor deposition and focused ion beam methods for prototype integrated circuit modification

The development of laser chemical vapor deposition and focused ion beam methods for prototype integrated circuit modification

datePublished
  • 2006
description
  • kuvitettu
  • Tiivistelmä ja 5 erip.
identifier
  • propertyID: FI-FENNI value: 836894
  • propertyID: FI-MELINDA value: 005325348
  • propertyID: skl value: fx836894
isbn
  • 951428139X
  • 9514281403
isPartOf
name
  • The development of laser chemical vapor deposition and focused ion beam methods for prototype integrated circuit modification
numberOfPages
  • 55, [33] sivu
P60048
P60050
publication
  • location: Oulu organizer: Oulun yliopisto
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