Advanced CMP processes for special substrates and for device manufacturing in MEMS applications

URI: http://urn.fi/URN:NBN:fi:bib:me:W00513892200
author
inLanguage
  • en
isPartOf
name
  • Advanced CMP processes for special substrates and for device manufacturing in MEMS applications
P60049

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Advanced CMP processes for special substrates and for device manufacturing in MEMS applications

URI: http://urn.fi/URN:NBN:fi:bib:me:I00513892201
description
  • Julkaistu myös verkkoaineistona
isPartOf
name
  • Advanced CMP processes for special substrates and for device manufacturing in MEMS applications
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Advanced CMP processes for special substrates and for device manufacturing in MEMS applications

URI: http://urn.fi/URN:NBN:fi:bib:me:I00513892200
datePublished
  • 2006
description
  • kuvitettu
  • Tiivistelmä ja 6 erip.
identifier
  • propertyID: FI-FENNI value: 848819
  • propertyID: FI-MELINDA value: 005138922
  • propertyID: skl value: fx848819
isbn
  • 9513868559
  • 9513868567
isPartOf
name
  • Advanced CMP processes for special substrates and for device manufacturing in MEMS applications
numberOfPages
  • 80, [55] sivu
P60048
P60050
publication
  • location: Espoo organizer: VTT
publisher
  • VTT

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