Precision prism coupling setup applied to measure planar silica films on silicon

Precision prism coupling setup applied to measure planar silica films on silicon

datePublished

• 1992

description

• kuvitettu

identifier

• propertyID: FI-FENNI value: 259532
• propertyID: FI-MELINDA value: 004610358
• propertyID: skl value: fx259532

isbn

• 9514561430

isPartOf

• Fennica
• Report series in physics

name

• Precision prism coupling setup applied to measure planar silica films on silicon

numberOfPages

• 28, [3] s.

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Helsinki organizer: University of Helsinki, Department of Physics

publisher

• University of Helsinki, Department of Physics