Inductive RF-plasma in materials research

Inductive RF-plasma in materials research

datePublished

• 1992

description

• kuvitettu

identifier

• propertyID: FI-FENNI value: 287171
• propertyID: FI-MELINDA value: 003849925
• propertyID: skl value: fx287171

isbn

• 9512211394

isPartOf

• Fennica
• Raportti

name

• Inductive RF-plasma in materials research

numberOfPages

• VII, 47, [2] s.

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Espoo organizer: Teknillinen korkeakoulu

publisher

• Teknillinen korkeakoulu