Diffusion of impurities in compound semiconductors and diamond-like carbon films

Diffusion of impurities in compound semiconductors and diamond-like carbon films

datePublished

• 1998

description

• Artikkeliväitöskirjan yhteenveto-osa ja 6 eripainosta.
• Diss. in physics.
• kuvitettu
• Tiivistelmä ja 6 erip. - Tiivistelmä myös erillisenä

identifier

• propertyID: FI-FENNI value: 608302
• propertyID: FI-MELINDA value: 000176194
• propertyID: skl value: fx608302

isbn

• 9525148564

isPartOf

• Acta polytechnica Scandinavica. MA, Mathematics and computing series
• Fennica

name

• Diffusion of impurities in compound semiconductors and diamond-like carbon films

numberOfPages

• 36, [33] s.

P60048

• <http://rdaregistry.info/termList/RDACarrierType/1049>

P60050

• <http://rdaregistry.info/termList/RDAMediaType/1007>

publication

• location: Espoo organizer: Teknillisten tieteiden akatemia

publisher

• Teknillisten tieteiden akatemia