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Laurila, Tomi
URI:
http://urn.fi/URN:NBN:fi:au:pn:000110668
name
Laurila, Tomi
Authored works
Tantalum-based diffusion barriers for copper metallization
Works contributed to
Paris, Helsinki, Paris
Stability of TaC diffusion barrier between Si and Cu
Works about Laurila, Tomi
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